TUBE FURNACES
Horizontal and vertical tube furnaces can be selected according to the purpose of use, and we have abundant experience with vertical multi-zone control type furnaces, which are particularly difficult to design. The furnace tube material can be SUS, quartz, alumina and other ceramics, carbon, etc., depending on the operating temperature and atmosphere, and optional specifications such as temperature gradient specifications, high vacuum specifications, oxygen concentration control, dew point control, and high-precision atmosphere control such as programmed pressurization control are also available.
SLIDE TYPE FURNACE
Specifications
- ●Dimension:
φ57×L450 (Furnace tube: quartz) - ●Max: 1000°C
- ●Horizontal 3-zone control
- ●Atmosphere:
Nitrogen, oxygen, argon, hydrogen, etc. - ●Furnace observation window (Optional)
TEMPERATURE GRADIENT
FURNACE
Specifications
- ●Dimension:φ42×L930
(Furnace tube: ceramic tube) - ●Max.operating: 1600°C
- ●Horizontal 7-zone control
H2 HIGH TEMPERATURE FURNACE
Specifications
- ●Dimension:φ40 x L270
(Furnace tube : ceramic tube) - ●Max.operating:1700°C (atmosphere: hydrogen)
- ●With exhaust gas igniter
ATMOSPHERE DOUBLE-TUBE
FURNACE
Specifications
- ●Dimension:φ50×L470
(Furnace inner tube: ceramic tube) - ●Operating temperature 900°C
(Inner tube atmosphere:Nitrogen + hydrogen, ammonia) - ●Max: 1000°C
- ●Horizontal 3-zone control
VERTICAL MULTI-ATMOSPHERE
HIGH TEMPERATURE TUBE
FURNACE
Specifications
- ●Dimension:φ90×H100
(Furnace tube: ceramic tube) - ●Max.operating temperature: 1600°C
- ●Vacuum replacement type
- ●Atmosphere: Nitrogen, oxygen, argon,
hydrogen, vacuum, etc.
VERTICAL HIGH VACUUM TUBE
FURNACES
Specifications
- ●Dimension:φ100×H100
(Furnace tube: SUS310S) - ●Operating temperature 800°C (vacuum)
- ●Max:900°C
- ●Equipped with oil diffusion pump
ULTRA- HIGH TEMPERATURE
TUBE FURNACE
Specifications
- ●Dimension:φ60×H2000
- ●Operating temperature: 2000°C
(Atmosphere: argon) - ●Max: 2200°C